The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2017
Filed:
Aug. 17, 2015
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Inventors:
Dong-soo Lee, Hwaseong-si, KR;
Sung-ho Jang, Suwon-si, KR;
Byeong-hee Kim, Seoul, KR;
Doug-yong Sung, Seoul, KR;
Dong-ok Shin, Suwon-si, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-Si, Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/30 (2006.01); H01J 37/32 (2006.01); G01J 1/44 (2006.01); G01J 1/42 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32146 (2013.01); G01J 1/44 (2013.01); H01J 37/32091 (2013.01); H01J 37/32935 (2013.01); H01J 37/32972 (2013.01); G01J 2001/4238 (2013.01); G01J 2001/4453 (2013.01);
Abstract
A diagnosis system for pulsed plasma includes an optical emission sensor (OES) to receive light generated the pulsed plasma, the pulsed plasma having been generated in accordance with a pulse signal, a digitizer to synchronize the electrical signal with the pulse signal, and an analyzer to analyze the synchronized electrical signal.