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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9563134 B1

PDFFull Text
Expired
Date of Patent:
Feb. 07, 2017

Filed:

Dec. 02, 2014

Optical system illuminating surface to be illuminated, exposure apparatus, imprint apparatus, method for manufacturing article, optical element, and method for manufacturing optical system

Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Nobuyuki Saito, Utsunomiya, JP;

Assignee:

Canon Kabushiki Kaisha, Tokyo, JP;

Attorney:

Canon U.S.A., Inc. IP Division

Primary Examiner:

Hung Henry Nguyen

Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03B 27/72 (2006.01); G03F 7/20 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70375 (2013.01); G03F 7/0002 (2013.01);
Abstract

An optical system illuminating a surface to be illuminated includes a wavefront splitting type integrator configured to split the wavefront of incident light to form a plurality of light sources on the exit surface side, and an optical element whose surface is polished in a scanning direction using a polishing tool. The optical element is disposed between the wavefront splitting type integrator and the surface to be illuminated, and has a direction indicating portion indicating the scanning direction. The arrangement direction of the plurality of light sources in a plane perpendicular to the optical axis of the optical system is non-parallel to the scanning direction indicated by the direction indicating portion.

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Saito, Nobuyuki. (2017). Optical system illuminating surface to be illuminated, exposure apparatus, imprint apparatus, method for manufacturing article, optical element, and method for manufacturing optical system (U.S. Patent No. 9563134). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9563134

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