The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2017
Filed:
Oct. 22, 2010
Shigeyoshi Netsu, Niigata, JP;
Shinichi Kurotani, Niigata, JP;
Kyoji Oguro, Niigata, JP;
Fumitaka Kume, Niigata, JP;
Masaru Hirahara, Niigata, JP;
Shigeyoshi Netsu, Niigata, JP;
Shinichi Kurotani, Niigata, JP;
Kyoji Oguro, Niigata, JP;
Fumitaka Kume, Niigata, JP;
Masaru Hirahara, Niigata, JP;
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Abstract
The upper electrodehas a holeextending from an upper surfaceto a lower surface, a boltis inserted from the upper surfaceof the upper electrodeinto the hole, and secured in a lower electrodeby a screw. A gapbetween an inside of the holeand a straight body portion of the boltallows the upper electrodeto slide in all directions in a placement surface (upper surface of the lower electrodein contact with the lower surfaceof the upper electrodein FIG.) that is a contact surface with an upper surface of the lower electrode, thereby providing an effect of preventing occurrence of a crack or a break in a U rod that can be expanded and contracted in all directions during a vapor phase growth process.