The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 31, 2017

Filed:

Feb. 27, 2015
Applicant:

Semiconductor Energy Laboratory Co., Ltd., Kanagawa-ken, JP;

Inventors:

Shunpei Yamazaki, Tokyo, JP;

Takeshi Fukunaga, Kanagawa, JP;

Attorney:
Int. Cl.
CPC ...
B05D 5/06 (2006.01); C23C 16/04 (2006.01); H01L 51/00 (2006.01); C23C 14/04 (2006.01); C23C 14/24 (2006.01); C23C 14/56 (2006.01); C23C 14/22 (2006.01); B05D 5/12 (2006.01); B05D 1/40 (2006.01); B05D 1/32 (2006.01); C23C 14/26 (2006.01); H01L 27/32 (2006.01); H01L 51/50 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0011 (2013.01); B05D 1/32 (2013.01); B05D 1/40 (2013.01); B05D 5/12 (2013.01); C23C 14/04 (2013.01); C23C 14/042 (2013.01); C23C 14/044 (2013.01); C23C 14/22 (2013.01); C23C 14/24 (2013.01); C23C 14/243 (2013.01); C23C 14/26 (2013.01); C23C 14/564 (2013.01); H01L 51/0008 (2013.01); H01L 51/5012 (2013.01);
Abstract

An organic material for a light emitting device is deposited over a substrate by evaporating the organic material from an evaporation source. The evaporation source comprises a plurality of discrete evaporation cells separated from each other, wherein each of the plurality of discrete evaporation cells contains the organic material. The evaporation source has a length along a first direction and a width along a second direction orthogonal to the first direction, the length being greater than the width. The plurality of discrete evaporation cells is arranged along the first direction. When the organic material is evaporated, a relative location of the evaporation source with respect to the substrate is changed along the second direction, and the evaporation of the organic material is initiated by heating the plurality of discrete evaporation cells.


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