The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2017
Filed:
Mar. 17, 2015
Applicant:
Globalfoundries Inc., Grand Cayman, KY;
Inventors:
Josephine B. Chang, Bedford Hills, NY (US);
Paul Chang, Bedford Hills, NY (US);
Guy M. Cohen, Ossining, NY (US);
Michael A. Guillorn, Cold Spring, NY (US);
Assignee:
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B05D 5/12 (2006.01); H01L 39/02 (2006.01); H01L 39/22 (2006.01); H01L 39/24 (2006.01);
U.S. Cl.
CPC ...
H01L 39/025 (2013.01); H01L 39/223 (2013.01); H01L 39/2493 (2013.01); B05D 5/12 (2013.01); H01L 39/2467 (2013.01);
Abstract
Silicided nanowires as nanobridges in Josephson junctions. A superconducting silicided nanowire is used as a weak-link bridge in a Josephson junction, and a fabrication process is employed to produce silicided nanowires that includes patterning two junction banks and a rough nanowire from a silicon substrate, reshaping the nanowire through hydrogen annealing, and siliciding the nanowire by introduction of a metal into the nanowire structure.