The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2017
Filed:
Jul. 22, 2015
Applicant:
Arizona Board of Regents on Behalf of Arizona State University, Scottsdale, AZ (US);
Inventors:
Terry L. Alford, Tempe, AZ (US);
Aritra Dhar, Tempe, AZ (US);
Assignee:
Arizona Board of Regents, Scottsdale, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/12 (2006.01); H01L 21/00 (2006.01); H01L 31/18 (2006.01); H01L 31/0224 (2006.01); H01L 51/52 (2006.01); H01L 51/44 (2006.01);
U.S. Cl.
CPC ...
H01L 31/1884 (2013.01); H01L 31/022483 (2013.01); H01L 51/442 (2013.01); H01L 51/5206 (2013.01); H01L 2251/308 (2013.01); H01L 2933/0016 (2013.01); Y02P 70/521 (2015.11);
Abstract
A microwave-annealed indium gallium zinc oxide (IGZO) film and methods of making the same are disclosed. The methods may comprise: depositing an IGZO film onto a substrate; and microwave annealing the IGZO film to produce a microwave-annealed IGZO film.