The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2017
Filed:
Mar. 07, 2013
Hitachi Kokusai Electric Inc., Tokyo, JP;
Junichi Kawasaki, Toyama, JP;
Hajime Abiko, Toyama, JP;
Hitachi Kokusai Electric Inc., Tokyo, JP;
Abstract
A substrate processing apparatus includes a substrate retaining mechanism into which retaining members on which substrates are placed are installed to retain the substrates; a substrate transfer unit configured to transfer at least one substrate; a detecting unit configured to detect states of the retaining members installed into the substrate retaining mechanism; a determination unit configured to compare data representing the states of the retaining members, which is obtained by the detecting unit, with master data, which is reference data obtained by detecting normal states of the retaining members, beforehand to determine the states of the retaining members; and a transfer control unit configured to control the substrate transfer unit according to the determination of the determination unit.