The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2017
Filed:
Apr. 14, 2015
Applicant:
Majid Riaziat, San Jose, CA (US);
Inventor:
Majid Riaziat, San Jose, CA (US);
Assignee:
CALIFORNIA SCIENTIFIC, INC., Sunnyvale, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/67 (2006.01); H01S 5/183 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02241 (2013.01); H01L 21/67 (2013.01); H01L 21/67017 (2013.01); H01S 5/18311 (2013.01);
Abstract
Wafer oxidation apparatus for selective oxidation of a semiconductor workpiece has an oxidation chamber. The oxidation chamber is heated by external infrared heating lamps. A chuck assembly is disposed within the oxidation chamber and configured to be approximately thermally isolated from the oxidation chamber. Carrier gas pathways deliver heated carrier gasses to the oxidation chamber at variable rates for oxidation uniformity.