The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2017
Filed:
Jun. 24, 2015
Applicant:
Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;
Inventor:
Jong Yun Kim, Yongin-si, KR;
Assignee:
Samsung Display Co., Ltd., Yongin, Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3405 (2013.01); H01J 37/345 (2013.01); H01J 37/3417 (2013.01); H01J 37/3447 (2013.01); H01J 37/3455 (2013.01);
Abstract
A magnetron sputtering apparatus includes a vacuum chamber, a cathode target that rotates on the outer side of a backing plate in the vacuum chamber, a magnetic circuit that is spaced from the outer side of the cathode target and defines an opening through which a plasma including a target material removed from the cathode target is ejected, and a yoke around the outer side of the cathode target, the yoke supporting the magnetic circuit.