The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2017
Filed:
Jul. 25, 2014
Nxp B.v., Eindhoven, NL;
Willem Besling, Eindhoven, NL;
Martijn Goossens, Eindhoven, NL;
Peter Steeneken, Eindhoven, NL;
Remco Pijnenburg, Eindhoven, NL;
Marten Oldsen, Kleve, DE;
Casper van der Avoort, Prinsenhof, DE;
ams International AG, Rapperswil, CH;
Abstract
Various exemplary embodiments relate to a pressure sensor including a pressure sensitive membrane suspended over a cavity, wherein the membrane is secured by a set of anchors to a substrate; and a getter material embedded in the membrane, wherein the surface of the getter is in contact with any gas within the cavity, and wherein two end points of the getter material are attached through the substrate by anchors capable of conducting through the substrate an electrical current through the getter material.