The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2017
Filed:
Jul. 23, 2013
Applicant:
Roth & Rau Ag, Hohenstein-Ernsttahl, DE;
Inventors:
Joachim Mai, Nobitz, DE;
Daniel Decker, Ehrenfriedersdorf, DE;
Stefan Helbig, Schmölln, DE;
Oliver Loewel, Hohenstein-Ernsttahl, DE;
Assignee:
Meyer Burger (Germany) AG, Hohenstein-Ernstthal, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); C23C 16/54 (2006.01); C23C 14/56 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4412 (2013.01); C23C 14/564 (2013.01); C23C 16/4401 (2013.01); C23C 16/455 (2013.01); C23C 16/458 (2013.01); C23C 16/4582 (2013.01); C23C 16/4583 (2013.01); C23C 16/45502 (2013.01); C23C 16/54 (2013.01);
Abstract
A device for gas movement in vacuum-coating systems is disclosed that extracts gaseous coating material in the coating chamber that has not been deposited on the substrates to be coated. At least one pump for extracting the coating material is connected to it in an axial extension of the suction device; the suction device has one or more suction openings and is divided up into at least two axial areas whose suction characteristics can be adjusted separately from one another to a great extent.