The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2017
Filed:
Sep. 10, 2013
Applicant:
Sunpower Corporation, San Jose, CA (US);
Inventors:
Peter John Cousins, Los Altos, CA (US);
Hsin-Chiao Luan, Palo Alto, CA (US);
Thomas Pass, San Jose, CA (US);
John Ferrer, Calamba, PH;
Rex Gallardo, Sta. Rosa, PH;
Stephen F. Meyer, Santa Clara, CA (US);
Assignee:
SunPower Corporation, San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C23C 14/50 (2006.01); C23C 16/458 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/345 (2013.01); C23C 14/50 (2013.01); C23C 16/4583 (2013.01); H01J 37/32752 (2013.01); H01J 37/34 (2013.01); H01L 21/6776 (2013.01); H01L 21/67706 (2013.01); H01L 21/68771 (2013.01);
Abstract
A system for substrate deposition is disclosed. The system includes a wafer pallet and an anode. The wafer pallet has a bottom and a top. The top of the wafer pallet is configured to hold a substrate wafer. The anode has a substantially fixed position relative to the wafer pallet and is configured to move with the wafer pallet through the deposition chamber. The anode is electrically isolated from the substrate wafer.