The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 31, 2017

Filed:

Jun. 28, 2012
Applicants:

Yoichiro Taga, Tokyo, JP;

Kazumasa Nishiwaki, Tokyo, JP;

Inventors:

Yoichiro Taga, Tokyo, JP;

Kazumasa Nishiwaki, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 37/10 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
B32B 37/1009 (2013.01); H01L 21/67092 (2013.01); H01L 21/67132 (2013.01); H01L 21/6836 (2013.01); H01L 2221/68327 (2013.01); H01L 2221/68381 (2013.01);
Abstract

A tape sticking apparatus includes a rubber sheet that partitions an airtight space formed above a chamber into first and second airtight spaces and, a tape frame that holds a tape above the rubber sheet, and a supply/exhaust mechanism that switches between pressurizing and depressurizing by supplying gas to or sucking gas from the first and second airtight spaces. The gas supply/exhaust mechanism includes a first flow-rate control valve that controls the flow rate of sucked gas when the first airtight space is depressurized, and a second flow-rate control valve that controls the flow rate of supplied when the first airtight space is pressurized.


Find Patent Forward Citations

Taga, Yoichiro. (2017). Tape sticking apparatus (U.S. Patent No. 9555607). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9555607

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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