The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2017
Filed:
Aug. 11, 2014
Applicant:
Dainippon Screen Mfg. Co., Ltd., Kyoto, JP;
Inventors:
Assignee:
SCREEN Holdings Co., Ltd., , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 7/00 (2006.01); B08B 3/10 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B08B 3/10 (2013.01); H01L 21/6715 (2013.01); H01L 21/67028 (2013.01); H01L 21/67103 (2013.01); B08B 7/00 (2013.01); B08B 7/0035 (2013.01); B08B 7/0064 (2013.01); B08B 7/0071 (2013.01);
Abstract
A substrate treatment method is provided, which includes a liquid film retaining step of retaining a liquid film of a treatment liquid on a major surface of a substrate, and a heater heating step of locating a heater in opposed relation to the major surface of the substrate to heat the treatment liquid film by the heater in the liquid film retaining step, wherein an output of the heater is changed from a previous output level in the heater heating step.