The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2017
Filed:
Mar. 10, 2015
Applicant:
Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto-fu, JP;
Inventors:
Keiichi Umeda, Nagaokakyo, JP;
Takehiko Kishi, Nagaokakyo, JP;
Toshio Nishimura, Nagaokakyo, JP;
Takashi Hase, Nagaokakyo, JP;
Assignee:
MURATA MANUFACTURING CO., LTD., Nagakakyo-shi, Kyoto-fu, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/21 (2006.01); H03H 3/007 (2006.01); H03H 9/02 (2006.01); H03H 9/24 (2006.01); H01L 41/29 (2013.01); H01L 41/31 (2013.01);
U.S. Cl.
CPC ...
H03H 9/21 (2013.01); H01L 41/29 (2013.01); H01L 41/31 (2013.01); H03H 3/0072 (2013.01); H03H 9/02448 (2013.01); H03H 9/2489 (2013.01); Y10T 29/42 (2015.01);
Abstract
A vibrating device having vibrating arms connected to a supporter. The vibrating arms have an n-type Si layer which is a degenerated semiconductor and an exciter provided on the n-type Si layer. The exciter has a piezoelectric thin film and a first and second electrodes with the piezoelectric thin film interposed therebetween.