The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 24, 2017

Filed:

Mar. 16, 2016
Applicant:

Renesas Electronics Corporation, Tokyo, JP;

Inventor:

Kazuyuki Omori, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/76 (2006.01); H01L 23/00 (2006.01); H01L 23/31 (2006.01); H01L 23/29 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 24/05 (2013.01); H01L 21/7685 (2013.01); H01L 21/76865 (2013.01); H01L 23/293 (2013.01); H01L 23/3171 (2013.01); H01L 24/03 (2013.01); H01L 2224/02373 (2013.01); H01L 2224/05144 (2013.01); H01L 2224/05623 (2013.01); H01L 2224/05624 (2013.01); H01L 2224/05664 (2013.01); H01L 2224/05666 (2013.01); H01L 2224/05671 (2013.01); H01L 2924/01029 (2013.01);
Abstract

Provided are a semiconductor device and a manufacturing method therefor that can prevent electric short-circuiting between redistribution lines. A barrier film is formed over each side surface of a copper redistribution line. The barrier film includes, for example, a manganese oxide film. The barrier film is also in contact with each end surface of a barrier metal film that is located in the position receding inward from the side surface of the copper redistribution line. A redistribution portion is formed by the copper redistribution line, the barrier film, and the barrier metal film.


Find Patent Forward Citations

Omori, Kazuyuki. (2017). Semiconductor device and manufacturing method therefor (U.S. Patent No. 9553060). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9553060

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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