The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2017
Filed:
Sep. 03, 2012
Applicant:
Markus Menath, Regensburg, DE;
Inventor:
Markus Menath, Regensburg, DE;
Assignee:
INFINEON TECHNOLOGIES AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/78 (2006.01); H01L 21/308 (2006.01);
U.S. Cl.
CPC ...
H01L 21/78 (2013.01); H01L 21/3086 (2013.01);
Abstract
In various embodiments, a method for processing a wafer may include: providing a wafer having at least one die region and at least one metallization disposed over the at least one die region; covering the at least one metallization with a protecting layer; plasma etching the wafer to form at least one die.