The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 24, 2017

Filed:

Oct. 24, 2014
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Jae In Sim, Yongin-si, KR;

Gyeong Seon Park, Seoul, KR;

Kyung Ja Lim, Suwon-si, KR;

Seung Woo Choi, Seoul, KR;

O Hak Kwon, Suwon-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 38/10 (2006.01); H01L 21/683 (2006.01); B32B 43/00 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6838 (2013.01); B32B 43/006 (2013.01); H01L 21/67092 (2013.01); H01L 21/68735 (2013.01); H01L 2221/68381 (2013.01); H01L 2221/68386 (2013.01); Y10T 156/1132 (2015.01); Y10T 156/1153 (2015.01); Y10T 156/1168 (2015.01); Y10T 156/1911 (2015.01); Y10T 156/1944 (2015.01); Y10T 156/1978 (2015.01);
Abstract

There is provided a substrate separation device and method for separating a growth substrate from a laminate structure which includes a support substrate, a semiconductor layer, and the growth substrate. The device includes: a first base which is configured to hold the laminate structure thereon, and includes a first holding unit configured to hold the support substrate defining a bottom surface of the laminate structure and a heating unit configured to heat the laminate structure; and a second base including a second holding unit disposed above the first holding unit and configured to hold the growth substrate defining an upper surface of the laminate structure.


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