The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 24, 2017

Filed:

Aug. 30, 2012
Applicants:

Kevin Ptasienski, O'Fallon, MO (US);

Kevin Robert Smith, Columbia, MO (US);

Cal Thomas Swanson, St. Louis, MO (US);

Philip Steven Schmidt, Winona, MN (US);

Mohammad Nosrati, Fenton, MO (US);

Jacob Robert Lindley, St. Louis, MO (US);

Allen Norman Boldt, Kirkwood, MO (US);

Sanhong Zhang, Ballwin, MO (US);

Louis P. Steinhauser, St. Louis, MO (US);

Dennis Stanley Grimard, Ann Arbor, MI (US);

Inventors:

Kevin Ptasienski, O'Fallon, MO (US);

Kevin Robert Smith, Columbia, MO (US);

Cal Thomas Swanson, St. Louis, MO (US);

Philip Steven Schmidt, Winona, MN (US);

Mohammad Nosrati, Fenton, MO (US);

Jacob Robert Lindley, St. Louis, MO (US);

Allen Norman Boldt, Kirkwood, MO (US);

Sanhong Zhang, Ballwin, MO (US);

Louis P. Steinhauser, St. Louis, MO (US);

Dennis Stanley Grimard, Ann Arbor, MI (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05D 23/00 (2006.01); H01L 21/67 (2006.01); H05B 3/20 (2006.01); H05B 1/02 (2006.01); H05B 1/00 (2006.01); H05B 3/02 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67103 (2013.01); H01L 21/67098 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H01L 21/6833 (2013.01); H05B 1/00 (2013.01); H05B 1/02 (2013.01); H05B 1/0202 (2013.01); H05B 1/0227 (2013.01); H05B 1/0233 (2013.01); H05B 3/02 (2013.01); H05B 3/20 (2013.01); H05B 2213/03 (2013.01); Y10T 156/10 (2015.01);
Abstract

An apparatus, such as a heater, is provided that includes a base member having at least one fluid passageway. A two-phase fluid is disposed within the fluid passageway, a pressure of the two-phase fluid being controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. A tuning layer is secured to the base member, and the tuning layer includes a plurality of zones. Furthermore, a component, such as a chuck by way of example, is secured to the tuning layer.


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