The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2017
Filed:
Mar. 19, 2013
Seiko Instruments Inc., Chiba-shi, Chiba, JP;
The University of Tokyo, Tokyo, JP;
Isao Shimoyama, Tokyo, JP;
Kiyoshi Matsumoto, Tokyo, JP;
Hidetoshi Takahashi, Tokyo, JP;
Minh-Dung Nguyen, Tokyo, JP;
Yoko Shinohara, Chiba, JP;
Takeshi Uchiyama, Chiba, JP;
Manabu Oumi, Chiba, JP;
Masataka Shinogi, Chiba, JP;
SEIKO INSTRUMENTS INC., Chiba, JP;
THE UNIVERSITY OF TOKYO, Tokyo, JP;
Abstract
A pressure sensor includes a sensor body which has a first surface and a cavity with an opening in the first surface, a cantilever which has a base end portion supported on the first surface and a distal end portion provided to form a gap from a peripheral edge of the opening inside the opening, is flexurally deformed according to a pressure difference between an inside and an outside of the cavity, and is formed of a semiconductor material, and a displacement measurement unit which measures a displacement of the cantilever vibrating according to the pressure difference at a frequency larger than a lower limit frequency f(Hz) defined by Expression (1), where a width (μm) of the gap is represented by G, a volume (ml) of the cavity is represented by V, and a proportional constant is represented by k.·()  (1)