The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2017
Filed:
Nov. 25, 2011
Takafumi Komatsu, Tokyo, JP;
Katsuya Fukushima, Tokyo, JP;
Takafumi Komatsu, Tokyo, JP;
Katsuya Fukushima, Tokyo, JP;
THK CO., LTD., Tokyo, JP;
Abstract
An alignment stage including: a base plate; one or more X direction thrust generation guide mechanisms for generating thrust and performing guidance in the direction of a straight line X; a pair of lower plates disposed above the X direction thrust generation guide mechanisms; a pair of upper plates provided corresponding to the lower plates, respectively; a pair of rotatable bearings disposed between the lower plates and the upper plates; one or more Y direction thrust generation guide mechanisms for generating thrust and performing guidance in the direction of a straight line Y perpendicular to the straight line X; and a table plate disposed above the Y direction thrust generation guide mechanisms. With this configuration, it is possible for the alignment stage to be compact and easy to assemble.