The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2017
Filed:
Jul. 20, 2015
Applicants:
Jin-seok Heo, Suwon-si, KR;
Jin-hong Park, Yongin-si, KR;
Inventors:
Jin-Seok Heo, Suwon-si, KR;
Jin-Hong Park, Yongin-si, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
A61N 5/06 (2006.01); H05G 2/00 (2006.01); G21K 1/06 (2006.01); G03F 7/20 (2006.01); B05B 12/12 (2006.01);
U.S. Cl.
CPC ...
H05G 2/008 (2013.01); B05B 12/12 (2013.01); G03F 7/70033 (2013.01); G21K 1/067 (2013.01); H05G 2/005 (2013.01);
Abstract
Provided is an apparatus for generating extreme ultraviolet light. The apparatus includes a collector mirror unit, a gas supply unit configured to supply a processing gas to the collector mirror unit, a gas supply nozzle arranged in at least one area of the collector mirror unit and configured to supply the processing gas to a surface of the collector mirror unit, and a controller configured to adjust a shape of a spray hole of the gas supply nozzle. The shape of the spray hole may be changed according to a control operation of the controller.