The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2017
Filed:
Jun. 27, 2012
Applicant:
Hiroshi Ono, Kyoto, JP;
Inventor:
Hiroshi Ono, Kyoto, JP;
Assignee:
KYOCERA CORPORATION, Kyoto-shi, Kyoto, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H02N 13/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); H02N 13/00 (2013.01);
Abstract
The present invention is an electrostatic chuck including a ceramic base body and an adsorption electrode provided inside of or on the lower surface of the ceramic base body and having a portion where a Mn content is 1×10% by mass or less in a region from the upper surface of the ceramic base body to the adsorption electrode.
Ono, Hiroshi. (2017). Electrostatic chuck (U.S. Patent No. 9543184). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9543184
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile