The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 10, 2017

Filed:

Jun. 18, 2014
Applicant:

Daifuku Co., Ltd., Osaka-shi, JP;

Inventors:

Hiroshi Otsuka, Gamo-gun, JP;

Shinsuke Kawamura, Gamo-gun, JP;

Tadahiro Yoshimoto, Gamo-gun, JP;

Assignee:

Daifuku Co., Ltd., Osaka-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 33/00 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G01N 33/0009 (2013.01); H01L 21/67769 (2013.01); H01L 21/67253 (2013.01); H01L 21/67393 (2013.01);
Abstract

An inspection apparatus used for an article storage facility includes an inactive gas supply portion provided with a supply nozzle provided in a placement support portion. A transport container having a supply port for an inactive gas is formed at a bottom portion thereof for accommodating substrates in a sealed state. The nozzle is joined to the supply port by a self weight of the transport container supported on the placement support portion so as to inject the inactive gas to an interior of the transport container. An inspection supply port is joined to the supply nozzle by a self weight of the inspection apparatus supported on the placement support portion, and is configured such that a gravity center position is supported on the placement support portion and coincides with a gravity center position of the transport container, the supply port inspects a state of supply of the inactive gas in the state of being supported on the placement support portion.


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