The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2017
Filed:
Apr. 29, 2015
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventor:
Hiroyuki Araki, Kyoto, JP;
Assignee:
SCREEN Holdings Co., Ltd., , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 1/02 (2006.01); B05B 17/06 (2006.01); B05C 11/08 (2006.01); B05B 3/02 (2006.01); B05B 13/02 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B05B 1/02 (2013.01); B05B 3/02 (2013.01); B05B 17/0607 (2013.01); B05C 11/08 (2013.01); B05B 13/0228 (2013.01); H01L 21/6715 (2013.01); H01L 21/67051 (2013.01);
Abstract
A substrate processing apparatus includes a substrate holding unit, an injection unit that injects droplets of a processing liquid from a plurality of injection ports respectively toward a plurality of collision positions on the substrate, and a liquid film forming unit. The liquid film forming unit discharges a protective liquid from a plurality of discharge ports toward a plurality of liquid contact positions that respectively cover different collision positions. The plurality of injection ports and the plurality of discharge ports may be formed in a nozzle. A nozzle moving unit may be provided, to move the nozzle along the substrate.