The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2017
Filed:
Apr. 30, 2013
Applicant:
Analog Devices, Inc., Norwood, MA (US);
Inventors:
Assignee:
Analog Devices, Inc., Norwood, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/08 (2006.01); H03H 9/09 (2006.01); H03H 9/15 (2006.01); H03H 9/25 (2006.01); B81B 7/00 (2006.01);
U.S. Cl.
CPC ...
H03H 9/25 (2013.01); B81B 7/0077 (2013.01);
Abstract
Microelectromechanical systems (MEMS) resonators and related methods and apparatus are provided. A MEMS resonator may include a first portion and a second portion. The first portion may be configured to resonate, and the second portion may be configured to operate based on an energy trapping principle to prevent energy from traveling therethrough from the first portion. The MEMS resonator may be a Lamb wave resonator. The MEMS resonator may be anchorless. The MEMS resonator may have a side contacted by the anchor, wherein the anchor contacts greater than approximately 50% of the side.