The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2017
Filed:
May. 28, 2015
Berliner Glas Kgaa Herbert Kubatz Gmbh & Co., Berlin, DE;
Oliver Baldus, Berlin, DE;
Berliner Glas KGaA Herbert Kubatz GmbH & Co., Berlin, DE;
Abstract
Holding apparatus () for electrostatically holding component (), (e.g., a silicon wafer), includes base body () composed of first and second plates (A,), the first plate being arranged on upper side (A) of base body () and second plate () carrying first plate (A), and second plate () being an electrically insulating material, a plurality of projecting, upper burls (A) arranged on upper side (A) and forming a support surface for component (), and first electrode device (A) having first electrodes (A) arranged on upper side (A) for receiving a clamping voltage, wherein first plate (A) is produced from electrically conductive, Si-based ceramic and carries upper plate insulating layer (A) which covers upper side (A), having upper burls (A), and the first electrodes (A) include electrode layers arranged on upper burls (A) and each carry upper electrode insulating layer (A). A method for producing the holding apparatus is also described.