The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 03, 2017

Filed:

Aug. 17, 2015
Applicant:

Ricoh Company, Ltd., Tokyo, JP;

Inventors:

Akira Shimofuku, Kanagawa, JP;

Atsushi Takeuchi, Kanagawa, JP;

Osamu Machida, Kanagawa, JP;

Assignee:

RICOH COMPANY, LTD., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/00 (2006.01); H01L 41/332 (2013.01); B41J 2/14 (2006.01); H01L 41/08 (2006.01); H01L 41/25 (2013.01); B41J 2/16 (2006.01);
U.S. Cl.
CPC ...
H01L 41/332 (2013.01); B41J 2/14233 (2013.01); B41J 2/161 (2013.01); B41J 2/164 (2013.01); B41J 2/1629 (2013.01); B41J 2/1645 (2013.01); H01L 41/0805 (2013.01); H01L 41/25 (2013.01);
Abstract

A method of fabricating an electromechanical transducer film includes applying a precursor solution on a support substrate, heating the substrate at a first temperature to form a ceramic thin-film in amorphous state, applying a sol-gel solution onto the ceramic thin-film, and heating the ceramic thin-film at a second temperature to form an electromechanical transducer thin-film in amorphous state. The method further includes heating the ceramic and transducer thin-films at a third temperature to thermally decompose an organic substance in the sol-gel solution and form a unitary thin-film, processing the unitary thin-film to form a patterned unitary thin-film, modifying an area on which the patterned film is not formed, discharging the sol-gel solution onto a surface of the patterned film by a liquid discharge head to apply the sol-gel solution to the surface of the patterned film, and heating the patterned film at a fourth temperature to crystallize the patterned film.


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