The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2017
Filed:
Jul. 14, 2015
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Makoto Nakazumi, Yamato, JP;
Yasutaka Nishi, Tokyo, JP;
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/30 (2006.01); H01L 27/12 (2006.01); G02F 1/1368 (2006.01); H01L 21/20 (2006.01); H01L 29/786 (2006.01); G02F 1/136 (2006.01);
U.S. Cl.
CPC ...
H01L 27/127 (2013.01); G02F 1/1368 (2013.01); H01L 21/2007 (2013.01); H01L 27/124 (2013.01); H01L 27/1225 (2013.01); H01L 27/1266 (2013.01); H01L 29/7869 (2013.01); G02F 2001/13613 (2013.01);
Abstract
A method of transferring a thin film is a method of transferring a thin film formed on a first substrate to a second substrate, the method including: allowing the first substrate to come into contact with a liquid to swell the first substrate; allowing the second substrate and the thin film to come into contact with each other via the liquid; and drying the liquid to allow the thin film to adhere to the second substrate.