The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2017
Filed:
May. 30, 2014
Applicant:
Tdk Corporation, Tokyo, JP;
Inventors:
Tadamasa Iwamoto, Tokyo, JP;
Jun Emoto, Tokyo, JP;
Toshihiko Miyajima, Tokyo, JP;
Hidenori Tsutsui, Tokyo, JP;
Assignee:
TDK Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/677 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67772 (2013.01); H01L 21/67017 (2013.01); H01L 21/67775 (2013.01);
Abstract
A load port unit can prevent or control leakage of inert gas from an EFEM system to the outside. The load port unit used in the EFEM system is provided with an air inlet that opens on a side facing a mini-environment between the upper end of an opener driving unit and the lower end of the pod. The width of the air inlet opening is larger than the width of the opening of the pod. With this arrangement, surplus gas is sucked from the pod when gas purging is performed on the pod.