The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2017
Filed:
Jul. 28, 2014
Applicant:
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Inventor:
Tomoyuki Takeishi, Yokkaichi, JP;
Assignee:
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/32 (2006.01); G03F 7/30 (2006.01); G03F 7/40 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G03F 7/3021 (2013.01); G03F 7/40 (2013.01); H01L 21/6715 (2013.01); H01L 21/67051 (2013.01);
Abstract
According to one embodiment, a developing apparatus and method comprises moving a first nozzle from a scan start position to a scan end position, with holding a second nozzle for supplying a rinse solution to be adjacent to the scan start position for the first nozzle, while supplying a developing solution from the first nozzle onto a wafer being rotated; and supplying the rinse solution from the second nozzle onto the wafer being rotated.