The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 03, 2017

Filed:

Oct. 03, 2014
Applicant:

Kabushiki Kaisha Nihon Micronics, Tokyo, JP;

Inventor:

Yoshiyuki Fukami, Ibaraki, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01); G01R 31/04 (2006.01); G01R 27/26 (2006.01); H05K 1/02 (2006.01); H05K 1/03 (2006.01); H05K 1/11 (2006.01); H05K 3/46 (2006.01); G01R 31/02 (2006.01);
U.S. Cl.
CPC ...
G01R 31/041 (2013.01); G01R 31/2805 (2013.01); G01R 31/2812 (2013.01); H05K 1/0268 (2013.01); G01R 31/026 (2013.01); H05K 1/0306 (2013.01); H05K 1/117 (2013.01); H05K 3/4605 (2013.01); H05K 2201/09845 (2013.01);
Abstract

An inspection apparatus for inspecting an inspection object. The inspection object includes a base body and wiring passing through the base body. The inspection apparatus includes an insulating substrate, a first electrode in the substrate with a portion of the first electrode exposed from a surface of the substrate to form a connection portion which may be electrically connected with the wiring, and a second electrode in the substrate. The first electrode and the second electrode are spaced apart, have mutually parallel portions, and are electrically insulated from each other.


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