The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2017
Filed:
Aug. 31, 2015
Canon Kabushiki Kaisha, Tokyo, JP;
Akio Akamatsu, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides a detection apparatus which detects an original mark on an original and a substrate mark on a substrate, the original mark and the substrate mark being arranged via a projection optical system, the apparatus comprising an optical system including an imaging device and configured to form an image of the original mark and an image of the substrate mark onto the imaging device, wherein the optical system includes a detection reference member having a first mark and a second mark, and is configured to form an image of the first mark onto the original, form an image of the second mark onto the substrate via the projection optical system and the original, and form the image of the first mark, and the image of the second mark onto the imaging device.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile