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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9534315 B1

PDFFull Text
Date of Patent:
Jan. 03, 2017

Filed:

Jul. 30, 2013

Diamond producing method and dc plasma enhanced cvd apparatus

Applicant:

Shin-estu Chemical Co., Ltd., Tokyo, JP;

Inventor:

Hitoshi Noguchi, Annaka, JP;

Assignee:

SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;

Attorney:

Birch, Stewart, Kolasch & Birch, LLP

Primary Examiner:

Michael Kornakov

Assistant Examiner:

Hua Qi

Int. Cl.
CPC ...
C30B 25/16 (2006.01); C23C 16/517 (2006.01); C23C 16/27 (2006.01); C23C 16/515 (2006.01); C30B 25/10 (2006.01); C30B 25/18 (2006.01); C30B 29/04 (2006.01);
U.S. Cl.
CPC ...
C30B 25/16 (2013.01); C23C 16/272 (2013.01); C23C 16/515 (2013.01); C23C 16/517 (2013.01); C30B 25/105 (2013.01); C30B 25/183 (2013.01); C30B 29/04 (2013.01);
Abstract

Diamond is grown on a substrate (S) from a mixture of a carbon-containing gas and hydrogen gas, by a DC plasma enhanced CVD process of applying a DC voltage between a stage electrode () for holding the substrate (S) and a voltage-applying electrode (). During the step of growing diamond by applying a DC voltage, a single pulse voltage of opposite polarity to the DC voltage for diamond growth is applied between the stage electrode and the voltage-applying electrode at a predetermined timing. Diamond of quality is produced at a stable growth rate.

Find Patent Forward Citations

Noguchi, Hitoshi. (2017). Diamond producing method and dc plasma enhanced cvd apparatus (U.S. Patent No. 9534315). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9534315

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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