The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2017
Filed:
Oct. 09, 2013
Applicants:
Yuki Ozaki, Shizuoka, JP;
Takaaki Sakurai, Shizuoka, JP;
Masakazu Kobayashi, Shizuoka, JP;
Inventors:
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 3/06 (2006.01); C09D 183/16 (2006.01); C08J 7/04 (2006.01); C08J 7/12 (2006.01); C23C 18/12 (2006.01); C23C 18/14 (2006.01); C01B 21/068 (2006.01); C08J 7/00 (2006.01);
U.S. Cl.
CPC ...
C09D 183/16 (2013.01); B05D 3/067 (2013.01); C01B 21/068 (2013.01); C08J 7/00 (2013.01); C08J 7/047 (2013.01); C08J 7/123 (2013.01); C23C 18/122 (2013.01); C23C 18/1233 (2013.01); C23C 18/1241 (2013.01); C23C 18/1245 (2013.01); C23C 18/14 (2013.01); C08J 2483/16 (2013.01);
Abstract
The present invention provides a dense silicic film and a producing method thereof. This method comprises coating a composition for coating film, which comprises a polymer having a silazane bond on a substrate, on a substrate, irradiating with light having a maximal peak in the range of 160-179 nm wavelength, and then irradiating with light having 10-70 nm wavelength longer maximal peak wavelength than the light used in the previous irradiation.