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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9533920 B1

PDFFull Text
Date of Patent:
Jan. 03, 2017

Filed:

Mar. 13, 2014

Ceramic heater and method for producing the same

Applicant:

Ngk Insulators, Ltd., Nagoya, JP;

Inventors:

Kazuhiro Nobori, Handa, JP;

Takuji Kimura, Kariya, JP;

Hidemi Nakagawa, Handa, JP;

Assignee:

NGK Insulators, Ltd., Nagoya, JP;

Attorney:

Burr & Brown, PLLC

Primary Examiner:

Shawntina Fuqua

Int. Cl.
CPC ...
H05B 3/10 (2006.01); C04B 35/645 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); H05B 3/14 (2006.01); B32B 18/00 (2006.01); C04B 35/111 (2006.01);
U.S. Cl.
CPC ...
C04B 35/645 (2013.01); B32B 18/00 (2013.01); C04B 35/111 (2013.01); H01L 21/67103 (2013.01); H01L 21/6831 (2013.01); H05B 3/143 (2013.01); C04B 2235/3206 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/445 (2013.01); C04B 2235/5445 (2013.01); C04B 2235/606 (2013.01); C04B 2235/6023 (2013.01); C04B 2235/6567 (2013.01); C04B 2235/6581 (2013.01); C04B 2235/72 (2013.01); C04B 2237/08 (2013.01); C04B 2237/343 (2013.01); C04B 2237/36 (2013.01); C04B 2237/595 (2013.01); C04B 2237/68 (2013.01);
Abstract

An electrostatic chuckincludes a disc-shaped alumina ceramic base, and a heater electrodeand an electrostatic electrodethat are embedded in the alumina ceramic base. An upper surface of the alumina ceramic basefunctions as a wafer-receiving surface. The heater electrodeis formed in a pattern shape, for example, in the manner of a single brush stroke so as to be arranged over the entire surface of the alumina ceramic base. When a voltage is applied to the heater electrode, the heater electrodegenerates heat, and heats a wafer W. This heater electrodecontains TiSias a main component.

Find Patent Forward Citations

Nobori, Kazuhiro. (2017). Ceramic heater and method for producing the same (U.S. Patent No. 9533920). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9533920

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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