The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2017
Filed:
Mar. 13, 2014
Applicant:
Ngk Insulators, Ltd., Nagoya, JP;
Inventors:
Assignee:
NGK Insulators, Ltd., Nagoya, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/10 (2006.01); C04B 35/645 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); H05B 3/14 (2006.01); B32B 18/00 (2006.01); C04B 35/111 (2006.01);
U.S. Cl.
CPC ...
C04B 35/645 (2013.01); B32B 18/00 (2013.01); C04B 35/111 (2013.01); H01L 21/67103 (2013.01); H01L 21/6831 (2013.01); H05B 3/143 (2013.01); C04B 2235/3206 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/445 (2013.01); C04B 2235/5445 (2013.01); C04B 2235/606 (2013.01); C04B 2235/6023 (2013.01); C04B 2235/6567 (2013.01); C04B 2235/6581 (2013.01); C04B 2235/72 (2013.01); C04B 2237/08 (2013.01); C04B 2237/343 (2013.01); C04B 2237/36 (2013.01); C04B 2237/595 (2013.01); C04B 2237/68 (2013.01);
Abstract
An electrostatic chuckincludes a disc-shaped alumina ceramic base, and a heater electrodeand an electrostatic electrodethat are embedded in the alumina ceramic base. An upper surface of the alumina ceramic basefunctions as a wafer-receiving surface. The heater electrodeis formed in a pattern shape, for example, in the manner of a single brush stroke so as to be arranged over the entire surface of the alumina ceramic base. When a voltage is applied to the heater electrode, the heater electrodegenerates heat, and heats a wafer W. This heater electrodecontains TiSias a main component.