The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 27, 2016

Filed:

Dec. 18, 2012
Applicant:

Korea Institute of Industrial Technology, Chungcheongnam-do, KR;

Inventors:

Chae Hwan Jeong, Gwangju, KR;

Jong Hwan Lee, Daejeon, KR;

Chang Heon Kim, Gwangju, KR;

Ho Sung Kim, Gyeonggi-do, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/0224 (2006.01); H01L 31/0352 (2006.01); H01L 31/0236 (2006.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
H01L 31/03529 (2013.01); H01L 31/02363 (2013.01); H01L 31/022425 (2013.01); H01L 31/035227 (2013.01); H01L 31/18 (2013.01); Y02E 10/50 (2013.01);
Abstract

One embodiment of the present invention relates to a method for manufacturing solar cells having a nano-micro composite structure on a silicon substrate and solar cells manufactured thereby. The technical problem to be solved is to provide a method for manufacturing solar cells and solar cells manufactured thereby, the method being capable of forming micro wires in various sizes according to the lithographic design of a photoresist and forming nano wires, which have various sizes and aspect ratios, by adjusting the concentration of a wet etching solution and immersion time.


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