The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2016
Filed:
Jun. 11, 2004
Freddy Roozeboom, Eindhoven, NL;
Adrianus Alphonsus Jozef Buijsman, Nijmegen, NL;
Patrice Gamand, Douvres la Delivrande, FR;
Antonius Lucien Adrianus Maria Kemmeren, Eindhoven, NL;
Gerardus Tarcisius Maria Hubert, Eindhoven, NL;
Freddy Roozeboom, Eindhoven, NL;
Adrianus Alphonsus Jozef Buijsman, Nijmegen, NL;
Patrice Gamand, Douvres la Delivrande, FR;
Antonius Lucien Adrianus Maria Kemmeren, Eindhoven, NL;
Gerardus Tarcisius Maria Hubert, Eindhoven, NL;
Tessera Advanced Technologies, Inc., San Jose, CA (US);
Abstract
A semiconductor substrate comprises both vertical interconnects and vertical capacitors with a common dielectric layer. The substrate can be suitably combined with further devices to form an assembly. The substrate can be made in etching treatments including a first step on the one side, and then a second step on the other side of the substrate.