The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 27, 2016

Filed:

Jun. 11, 2004
Applicants:

Freddy Roozeboom, Eindhoven, NL;

Adrianus Alphonsus Jozef Buijsman, Nijmegen, NL;

Patrice Gamand, Douvres la Delivrande, FR;

Antonius Lucien Adrianus Maria Kemmeren, Eindhoven, NL;

Gerardus Tarcisius Maria Hubert, Eindhoven, NL;

Inventors:

Freddy Roozeboom, Eindhoven, NL;

Adrianus Alphonsus Jozef Buijsman, Nijmegen, NL;

Patrice Gamand, Douvres la Delivrande, FR;

Antonius Lucien Adrianus Maria Kemmeren, Eindhoven, NL;

Gerardus Tarcisius Maria Hubert, Eindhoven, NL;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/12 (2006.01); H01L 23/053 (2006.01); H01L 29/66 (2006.01); H01L 21/768 (2006.01); H01L 23/48 (2006.01); H01L 27/08 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66181 (2013.01); H01L 21/76898 (2013.01); H01L 23/481 (2013.01); H01L 27/0805 (2013.01); H01L 29/0657 (2013.01); H01L 2224/05001 (2013.01); H01L 2224/05009 (2013.01); H01L 2224/0557 (2013.01); H01L 2224/05568 (2013.01); H01L 2224/16225 (2013.01); H01L 2924/0002 (2013.01); H01L 2924/00014 (2013.01); H01L 2924/3011 (2013.01);
Abstract

A semiconductor substrate comprises both vertical interconnects and vertical capacitors with a common dielectric layer. The substrate can be suitably combined with further devices to form an assembly. The substrate can be made in etching treatments including a first step on the one side, and then a second step on the other side of the substrate.


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