The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 27, 2016

Filed:

Aug. 12, 2014
Applicant:

Excillum Ab, Kista, SE;

Inventors:

Oscar Hemberg, Stockholm, SE;

Tomi Tuohimaa, Stockholm, SE;

Mikael Otendal, Stockholm, SE;

Assignee:

EXCILLUM AB, Kista, SE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 35/02 (2006.01); H01J 35/08 (2006.01); G03F 7/20 (2006.01); H01J 35/12 (2006.01); H05G 2/00 (2006.01);
U.S. Cl.
CPC ...
H01J 35/08 (2013.01); G03F 7/70033 (2013.01); H01J 35/12 (2013.01); H05G 2/003 (2013.01); H05G 2/008 (2013.01); H01J 2235/082 (2013.01); H01J 2235/1204 (2013.01); H01J 2235/1279 (2013.01);
Abstract

Closed-loop circulation for providing liquid metal to an interaction region at which an electron beam is to impact upon the liquid metal to produce X-rays is presented. In a method, the pressure of the liquid metal is raised to at least 10 bar using a high-pressure pump. The pressurized liquid metal is then conducted to a nozzle and ejected into a vacuum chamber in the form of a spatially continuous jet. After passage through the vacuum chamber, the liquid metal is collected in a collection reservoir, and the pressure of the liquid metal is raised to an inlet pressure, e.g. using a primer pump, suitable for the inlet of the high-pressure pump. Also, a corresponding circulation system and an X-ray source provided with such circulation system.


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