The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2016
Filed:
Feb. 18, 2014
Applicant:
Commissariat a L'energie Atomique ET Aux Ene Alt, Paris, FR;
Inventor:
Eric Ollier, Grenoble, FR;
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00515 (2013.01); B81C 1/00206 (2013.01); B81C 1/00412 (2013.01); B81C 1/00626 (2013.01); B81C 2201/0114 (2013.01); B81C 2201/0115 (2013.01); B81C 2201/038 (2013.01);
Abstract
Process for fabrication of a micromechanical and/or nanomechanical structure comprising the following steps, starting from an element comprising a support substrate and a sacrificial layer: