The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2016
Filed:
Dec. 27, 2013
Korea Institute of Machinery & Materials, Daejeon, KR;
Jae-Jong Lee, Daejeon, KR;
Hyung-Jun Lim, Daejeon, KR;
Kee-Bong Choi, Daejeon, KR;
Gee-Hong Kim, Daejeon, KR;
KOREA INSTITUTE OF MACHINERY & MATERIALS, Daejeon, KR;
Abstract
In an apparatus and a method for liquid transfer imprint lithography, the apparatus includes a roll unit, a plane unit and a control unit. The roll unit includes a roll stamp, a horizontal moving stage, a roll angular compensating stage and a roll rotating part. The plane unit is disposed under the roll unit and includes a first substrate, a first fixing chuck, a first substrate driving part, a second substrate, a second fixing chuck and a second substrate driving part. The control unit controls an operation of the roll unit and the plane unit.