The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 27, 2016

Filed:

Mar. 25, 2013
Applicant:

Kawasaki Jukogyo Kabushiki Kaisha, Kobe-shi, Hyogo, JP;

Inventors:

Mutsuhiro Nakazawa, Kobe, JP;

Kazunori Takahara, Kobe, JP;

Osami Oogushi, Kobe, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/08 (2014.01); B23K 26/00 (2014.01); B23K 26/073 (2006.01); H01L 31/0463 (2014.01); H01L 31/18 (2006.01); B23K 26/40 (2014.01);
U.S. Cl.
CPC ...
B23K 26/0892 (2013.01); B23K 26/0087 (2013.01); B23K 26/073 (2013.01); B23K 26/083 (2013.01); B23K 26/0838 (2013.01); B23K 26/0869 (2013.01); B23K 26/364 (2015.10); B23K 26/40 (2013.01); H01L 31/0463 (2014.12); H01L 31/18 (2013.01); B23K 2203/172 (2015.10); B23K 2203/56 (2015.10); Y02E 10/50 (2013.01);
Abstract

A beam head unit including beam heads configured to scan a single laser beam on a thin-film layer of a workpiece from an irradiation start side toward an irradiation end side in a direction crossing a feeding direction of the workpiece while the workpiece is fed by a constant-speed feeder; laser oscillator configured to emit the laser beam to irradiate each beam head; a controller configured to control scanning speed of the laser beam emitted from each beam head and feeding speed of the workpiece to control a machining line formed in the workpiece fed at the predetermined feeding speed. The controller is configured to switch a beam head to use to form the machining line between the beam heads to form the machining line alternately. This configuration makes it possible to form machining lines highly efficiently in the thin-film layer of the workpiece while feeding the workpiece.


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