The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2016
Filed:
Oct. 31, 2011
Dariusz Burak, Fort Collins, CO (US);
Phil Nikkel, Loveland, CO (US);
John Choy, Westminster, CO (US);
Alexandre Shirakawa, San Jose, CA (US);
Stefan Bader, Fort Collins, CO (US);
Dariusz Burak, Fort Collins, CO (US);
Phil Nikkel, Loveland, CO (US);
John Choy, Westminster, CO (US);
Alexandre Shirakawa, San Jose, CA (US);
Stefan Bader, Fort Collins, CO (US);
Avago Technologies General IP (Singapore) Pte. Ltd., Singapore, SG;
Abstract
In a representative embodiment, a bulk acoustic wave (BAW) resonator, comprises: a cavity disposed in a substrate; a first electrode disposed over the cavity; a planarization layer disposed adjacent to the first electrode; a piezoelectric layer disposed over the first electrode; and a second electrode disposed over the piezoelectric layer.