The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2016
Filed:
May. 27, 2014
Sandia Corporation, Albuquerque, NM (US);
Roy H. Olsson, Albuquerque, NM (US);
Thomas A. Friedmann, Albuquerque, NM (US);
Sara Jensen Homeijer, Albuquerque, NM (US);
Michael Wiwi, Albuquerque, NM (US);
Khalid Mikhiel Hattar, Albuquerque, NM (US);
Blythe Clark, Albuquerque, NM (US);
Todd Bauer, Albuquerque, NM (US);
Stuart B. Van Deusen, Albuquerque, NM (US);
Sandia Corporation, Albuquerque, NM (US);
Abstract
The present invention relates to a single crystal micromechanical resonator. In particular, the resonator includes a lithium niobate or lithium tantalate suspended plate. Also provided are improved microfabrication methods of making resonators, which does not rely on complicated wafer bonding, layer fracturing, and mechanical polishing steps. Rather, the methods allow the resonator and its components to be formed from a single crystal.