The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 20, 2016

Filed:

Feb. 25, 2015
Applicant:

Semiconductor Manufacturing International (Shanghai) Corporation, Shanghai, CN;

Inventor:

Fumitake Mieno, Shanghai, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 29/10 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01); H01L 27/146 (2006.01); H01L 31/105 (2006.01); H01L 29/49 (2006.01);
U.S. Cl.
CPC ...
H01L 29/6675 (2013.01); H01L 27/14692 (2013.01); H01L 29/4908 (2013.01); H01L 29/78663 (2013.01); H01L 31/1055 (2013.01);
Abstract

A gate electrode and method for manufacturing the same includes an amorphous gate metal layer. The amorphous gate metal layer includes an amorphous metal alloy material layer having at least two metallic elements of an amorphous material or an amorphous metal compound material layer having at least one metallic element and at least one non-metallic element selected from the IIIA group, the IVA group, and the VA group of the Periodic Table. The atoms are arranged evenly in the amorphous gate metal layer, there is no noticeable grains and grain boundaries, so that no defects will be generated through a carrier recombination, and the carrier mobility is increased and the carrier can be uniformly distributed.


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