The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2016
Filed:
Jul. 22, 2015
Applicant:
Sandisk Technologies, Inc., Plano, TX (US);
Inventors:
Erika Kanezaki, Yokkaichi, JP;
Ryo Nakamura, Yokkaichi, JP;
Kotaro Jinnouchi, Yokkaichi, JP;
Satoshi Kamata, Yokkaichi, JP;
Assignee:
SanDisk Technologies LLC, Plano, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/108 (2006.01); H01L 21/20 (2006.01); H01L 27/115 (2006.01); H01L 21/768 (2006.01); H01L 27/02 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11524 (2013.01); H01L 21/76816 (2013.01); H01L 21/76865 (2013.01); H01L 21/76877 (2013.01); H01L 27/0207 (2013.01);
Abstract
A dielectric layer extending over a substrate has alternating first and second trenches extending in a first direction. The first trenches have a first shape in cross section along a plane that is perpendicular to the first direction and the second trenches have a second shape in cross section along the plane. Bit lines are located in at least the first trenches.