The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2016
Filed:
Feb. 21, 2014
Applicant:
California Institute of Technology, Pasadena, CA (US);
Inventors:
Sameer Walavalkar, Studio City, CA (US);
Mark D. Goldberg, Alta Loma, CA (US);
Axel Scherer, Barnard, VT (US);
Assignee:
CALIFORNIA INSTITUTE OF TECHNOLOGY, Pasadena, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/762 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76283 (2013.01); H01L 21/762 (2013.01);
Abstract
Novel methods to fabricate biological sensors and electronics are disclosed. A silicon-on-insulator wafer can be employed by etching a pattern of holes in the silicon layer, then a pattern of cavities in the insulating layer, and then sealing the top of the cavities. Further, n or p doped regions and metallic regions can be defined in the processed wafer, thereby enabling integration of biological sensing and electronic capabilities in the same wafer.