The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2016
Filed:
Apr. 09, 2014
Applicant:
Ion Beam Services, Peynier, FR;
Inventors:
Frank Torregrosa, Simiane, FR;
Laurent Roux, Marseilles, FR;
Assignee:
ION BEAM SERVICES, Peynier, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/00 (2006.01); H01J 37/317 (2006.01); C23C 14/48 (2006.01); C23C 14/50 (2006.01); H01J 37/32 (2006.01); H01J 37/08 (2006.01); H01J 37/20 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3171 (2013.01); C23C 14/48 (2013.01); C23C 14/50 (2013.01); H01J 37/08 (2013.01); H01J 37/20 (2013.01); H01J 37/32412 (2013.01); H01J 37/32541 (2013.01); H01J 37/32568 (2013.01); H01J 37/32715 (2013.01);
Abstract
The present invention relates to an ion implantation machinethat comprises: The machine is remarkable in that: