Apparatus, system, method and storage medium for image inspection result determination and verifying false defect detections due to position matching errors

Abstract

An apparatus for verifying an inspection result includes an inspection result obtaining unit to obtain inspection result indicating defect amount and defect position in a scanned image, from an inspection result of defect judgment of the scanned image with respect to an inspection reference image, the defect judgment being performed through dividing at least one of the scanned image and the inspection reference image and conducting position matching of the scanned image and inspection reference image; and a verification unit to count defect amount occurring to the scanned image, to determine whether a defect pattern occurring to the scanned image matches a pre-set condition corresponding to a false detection condition causable by failure of the position matching, and to determine that defect occurring to the scanned image is a false detection when the counted defect amount is a threshold or more, and the defect pattern matches the false detection condition.