The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2016
Filed:
Feb. 08, 2013
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventor:
Hironori Maeda, Utsunomiya, JP;
Assignee:
CANON KABUSHIKI KAISHA, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 9/00 (2006.01); G01B 11/14 (2006.01); G03F 7/20 (2006.01); G01B 11/00 (2006.01); G01B 11/06 (2006.01); G01N 21/41 (2006.01); G01S 17/88 (2006.01);
U.S. Cl.
CPC ...
G03F 9/7084 (2013.01); G01B 11/002 (2013.01); G01B 11/0608 (2013.01); G01B 11/14 (2013.01); G01N 21/41 (2013.01); G03F 7/70641 (2013.01); G03F 9/7026 (2013.01); G03F 9/7057 (2013.01); G01S 17/88 (2013.01);
Abstract
A detection apparatus, which detects a mark formed on a lower surface of a target object, includes: a first detector which illuminates the mark from an upper surface side of the target object to detect an image of the illuminated mark; a second detector which detects an upper surface position of the target object; and a processor which obtains information indicating a focus position to focus on the mark in the first detector, based on the upper surface position detected by the second detector.